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Developments in MEMS scale printable alkaline and Li-ion technology

機(jī)譯:MEMS規(guī)??捎∷A性和鋰離子技術(shù)的發(fā)展

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摘要

Two technologies for MEMS (Microelectromechanical Systems) scale cell formation are discussed. First, the fabrication of planar alkaline cell batteries compatible with MEMS scale power storage applications is shown. Both mm scale and sub-mm scale individual cells and batteries have been constructed. The chosen coplanar electrode geometry allows for easy fabrication of series connected cells enabling higher voltage while simplifying the cell sealing and electrode formation. The Zn/Ag alkaline system is used due to the large operating voltage, inherent charge capacity, long shelf life, and ease of fabrication. Several cells have been constructed using both plated and spun-on silver. The plated cells are shown to be limited in performance due to inadequate surface area and porosity; however, the cells made from spun-on colloidal silver show reasonable charge capacity and power performance with current densities of up to 200 uA/mm2 and charge capacities of up to 18 mA-s/mm2. Second, a new printing method for interdigitated 3-D cells is introduced. A microfluidic printhead capable of dispensing multiple materials at high resolution and aspect ratio is described and used to form fine interdigitated cell features which show >10 times improvement in energy density. Representative structures enabled by this method are modeled, and the energy and power density improvements are reported.
機(jī)譯:討論了兩種用于MEMS(微機(jī)電系統(tǒng))規(guī)模單元形成的技術(shù)。首先,示出了與MEMS規(guī)模的儲能應(yīng)用兼容的平面堿性電池的制造。毫米級和亞毫米級的單個電池和電池組均已構(gòu)建。選定的共面電極幾何形狀可輕松制造串聯(lián)連接的電池,從而實現(xiàn)更高的電壓,同時簡化電池密封和電極形成。使用Zn / Ag堿性系統(tǒng)的原因是工作電壓高,固有充電容量大,保質(zhì)期長且易于制造。使用鍍銀和旋轉(zhuǎn)鍍銀已構(gòu)建了多個電池。由于沒有足夠的表面積和孔隙率,鍍層電池的性能受到限制。但是,由旋涂膠體銀制成的電池具有合理的充電容量和功率性能,電流密度高達(dá)200 uA / mm2,充電容量高達(dá)18 mA-s / mm2。其次,介紹了一種用于交叉指代3-D單元的新打印方法。描述了一種能夠以高分辨率和長寬比分配多種材料的微流體打印頭,該打印頭用于形成精細(xì)的叉指電池特征,其能量密度提高了10倍以上。對通過這種方法啟用的代表性結(jié)構(gòu)進(jìn)行了建模,并報告了能量和功率密度的改進(jìn)。

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